Reliability Evaluation of Thermally Actuated Micromachined Relays for Space Applications
File Name: Micromachined Relays_NEPP report.doc | Date Submitted: 11/04/02
Description:
Deliverable for NEPP Task COTS MEMS Evaluation
Abstract:
This paper reports results on electrical characteristics, evaluation of design, and reliability of the first commercially available micromachined relays. The parts have been characterized in a wide range of temperatures (from –100 °C to +180 °C) and load conditions (voltages from 10 V to 70 V and currents from 5 mA to 200 mA). Mechanical integrity of the parts has been evaluated by subjecting them to multiple mechanical shocks in the range from 100 G to 1000 G up to 10,000 shocks. Life testing was performed at different contact voltages and current loads during 108 switching cycles. To simulate space operation conditions, characteristics of the parts were monitored during vacuum testing. Typical failure modes associated with different test conditions are discussed.
Related Project(s):
EPAR (Electronic Parts)
Related Area(s) of Emphasis:
MEMS/MOEMs Reliability Assurance
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