ABSTRACT

Micro-electro-mechanical sensor systems (MEMS Sensors) are being considered for a variety of applications in space and launch operations. These applications include health and status monitoring, environmental monitoring, automated control, repair and service. A microaccelerometer performance was characterized in detail and their failure mechanisms were identified by subjecting them to 1,000 thermal cycles under extreme temperatures (-65 to +150°C) and to 30,000 shocks at 2,000 g. In addition, several other MEMS sensors (microaccelerometers and temperature sensors) were characterized at the extremes of their temperature ranges. It consists of a 10-day test that subjected various microaccelerometers to both continuous thermal cycling between temperatures of -40 °C and +85 °C and mechanical loading. A comparison of the data from microaccelerometers of the same type and between several types will be presented. Self-test output signals and X-ray evaluation test data after completion of 182 thermal cycles will also be presented.