MEMS RESOURCES

RFMEMS Capacitive Switch Reliability

 J. R. Reid (Air Force Research Laboratory), “Capacitive Switch Reliability Issues”, GOMAC  Digest 2002, March 11-14, Monterey California

Goldsmith, C.; Ehmke, J.; Malczewski, A.; Pillans, B.; Eshelman, S.; Yao, Z.; Brank, J.; Eberly, M.;”Lifetime Characterization of Capacitive RF MEMS Switches”, Microwave Symposium Digest, 2001 IEEE MTT-S International , Volume: 1 , 2001
Page(s): 227 -230 vol.1
 

Pillans, B.; Kleber, J.; Goldsmith, C.; Eberly, M.; “RF Power handling of Capacitive RF MEMS Devices”,Microwave Symposium Digest, 2002 IEEE MTT-S International , Volume: 1 , 2002 Page(s): 329 -332

RF MEMS Capacitive Switch Performance

Yao, Z.J.; Chen, S.; Eshelman, S.; Denniston, D.; Goldsmith, C.; “Micromachined Low-Loss Microwave Switches”, Microelectromechanical Systems, Journal of , Volume: 8 Issue: 2 , Jun 1999 , Page(s): 129 -134

Goldsmith, C.; Tsen-Hwang Lin; Powers, B.; Wen-Rong Wu; Norvell, B.; “Micromechanical Membrane Switches”,Microwave Symposium Digest, 1995., IEEE MTT-S International , 16-20 May 1995 ,Page(s): 91 -94 vol.1

Balaraman, D.; Bhattacharya, S.K.; Ayazi, F.; Papapolymerou, J.; “Low-Cost Low Actuation Voltage Copper RF MEMS Switches”, Microwave Symposium Digest, 2002 IEEE MTT-S International , Volume: 2 , 2002, Page(s): 1225 –1228

Goldsmith, C.L.; Zhimin Yao; Eshelman, S.; Denniston, D.;”Performance of Low-Loss RF MEMS Capacitive Switches” , IEEE Microwave and Guided Wave Letters [see also IEEE Microwave and Wireless Components Letters] , Volume: 8 Issue: 8 , Aug 1998
Page(s): 269 –271

General MEMS Switch Reliability

Goldsmith, C.; Kleber, J.; Pillans, B.; Forehand, D.; Malczewski, A.; Frueh, P.;”RF MEMS: Benefits& Challenges of an Evolving RF Switch Technology”, Gallium Arsenide Integrated Circuit (GaAs IC) Symposium, 2001. 23rd Annual Technical Digest , 2001
Page(s): 147 -148